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D. Yakimets, T. Huynh Bao, M. Garcia Bardon, M. Dehan, N. Collaert, A. Mercha, Z. Tokei, A. Thean, D. Verkest and K. De Meyer, “Lateral versus vertical gate-all-around FETs for beyond 7nm technologies,” in 72nd Device Research Conference (DRC 2014), IEEE, Jun. 2014, pp. 2.
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