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Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications Host Publication: 35 Authors: V. Matvejev, C. De Tandt, W. Ranson and J. Stiens Publication Year: 2010
Abstract: Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.
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