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A 1k-pixel 3D CMOS sensor Host Publication: Finds and Results from the Swedish Cyprus Expedition: A Gender Perspective at the Medelhavsmuseet Authors: W. van der Tempel, R. Grootjans, D. Van Nieuwenhove and M. Kuijk Publisher: IEEE Publication Date: Oct. 2008 Number of Pages: 3 ISBN: 978-1-4244-2580-8
Abstract: A solid-state three-dimensional Time-of-Flight sensor is presented consisting of 32 * 32 range pixels based on Current-Assisted Photonic Demodulation (CAPD). Each pixel measures 30 micometer * 30 micometer and consists of 6 transistors and a differential current-assisted photonic demodulator, yielding a Fill-Factor of 66%. The sensor is implemented in 0.35 m standard CMOS technology without optical optimization steps, while still achieving a 0.2 A/W responisivity at 870 nm. Range-finding is achieved through Modulated Wave Time-of-Flight using a modulation frequency of 20 MHz. The range performance of this sensor is discussed and TOF measurements of a prototype camera-system using this sensor are presented
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