%0 Conference Paper %A D. Yakimets %A M. Garcia Bardon %A D. Jang %A P. Schuddinck %A Y. Sherazi %A P. Weckx %A K. Miyaguchi %A B. Parvais %A P. Raghavan %A A. Spessot %A D. Verkest %A A. Mocuta %T Power aware FinFET and lateral nanosheet FET targeting for 3nm CMOS technology %B 63rd IEEE International Electron Devices Meeting, IEDM 2017 %I Institute of Electrical and Electronics Engineers Inc %8 Jan. 2018
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