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@InProceedings{Pub_7558, author = {W. Vandermeiren, J. Stiens, C. De Tandt, W. Ranson, G. Shkerdin and R. Vounckx}, title={Wafer scale non-destructive metrology on sub-wavelength diffraction gratings by means of Wood's anomaly}, booktitle = {SPIE Optical Micro- and Nanometrology IV}, publisher = {SPIE}, month={May}, year={2012}, pages={6} }
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